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CEN CENELEC - Page 815/1255
Norma Técnica EN 62047-11
Title:
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-12
Title:
Semiconductor devices - Microelectromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (IEC 62047-12:2011)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-13
Title:
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear-type test methods of measuring adhesive strength for MEMS structures (IEC 62047-13:2012)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-14
Title:
Semiconductor devices - Microelectromechanical devices - Part 14: Forming limit measuring method of metallic film materials (IEC 62047-14:2012)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-15
Title:
Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding strength between PDMS and glass (IEC 62047-15:2015)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-16
Title:
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods (IEC 62047-16:2015)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-17
Title:
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (IEC 62047-17:2015)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-18
Title:
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials (IEC 62047-18:2013)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-19
Title:
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses (IEC 62047-19:2013)
Entity:
CEN CENELEC
Subject:
Electromechanical components for electronic and telecommunications equipment in general
Norma Técnica EN 62047-2
Title:
Semiconductor devices - Micro electromechanical devices - Part 2: Tensile testing method of thin film materials (IEC 62047-2:2006)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-20
Title:
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-21
Title:
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-22
Title:
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates (IEC 62047-22:2014)
Entity:
CEN CENELEC
Subject:
Other graphical symbols
Norma Técnica EN 62047-25
Title:
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (IEC 62047-25:2016)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-26
Title:
Semiconductor devices - Micro-electromechanical devices - Part 6: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-3
Title:
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing (IEC 62047-3:2006)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-4
Title:
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS (IEC 62047-4:2008)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-5
Title:
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches (IEC 62047-5:2011)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-6
Title:
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials (IEC 62047-6:2009)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-7
Title:
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection (IEC 62047-7:2011)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-8
Title:
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62047-9
Title:
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (IEC 62047-9:2011)
Entity:
CEN CENELEC
Subject:
Semiconductor devices in general
Norma Técnica EN 62052-11
Title:
Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 11: Metering equipment (IEC 62052-11:2003)
Entity:
CEN CENELEC
Subject:
Electricity supply system
Norma Técnica EN 62052-21
Title:
Electricity metering equipment (a.c.) - General requirements, tests and test conditions - Part 21: Tariff and load control equipment (IEC 62052-21:2004)
Entity:
CEN CENELEC
Subject:
Electricity supply system
Norma Técnica EN 62052-31
Title:
Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 31: Product safety requirements and tests (IEC 62052-31:2015)
Entity:
CEN CENELEC
Subject:
Electricity supply system
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